Controlled surface crystallization of fused silica by Li+-Ion implantation

A new method of producing a glass-ceramic surface layer on fused silica has been demonstrated using Li+-ion implantation and relatively low-temperature annealing. Infrared reflection spectroscopy (IRS) was used to study the effects of ion implantation on structural changes. Isochronal annealing of samples implanted with 250 keV Li+/cm2 brings about a dramatic change in the IRS spectra at 800°C in that it becomes identical with that of α-quartz. The dependence of the degree of crystallization on temperature, Li+-ion fluence, and silica type was studied.