Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

Arrays of microdischarge devices, 100/spl times/100 /spl mu/m/sup 2/ in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5/spl times/5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.