Optical Micro-Assembly with Automatic Alignment Using MEMS Active Interconnects

In this article, a novel method for interconnecting micro-optoelectromechanical system (MOEMS) is presented. The design concept is proven by a pair of V-shape voltage controlled actuators that are fabricated on single silicon-on-insulator (SOI) wafer. When a DC voltage is applied to the actuators, the deformation of the actuators enables the sockets to open larger than the dimension of the optical filter block. Then, the filter block is inserted into the socket by a robotic assembly system. After releasing the applied voltage, the filter block is held by a static force that is generated from the deformation of the bent beams. A two-channel DWDM micro-system is assembled and demonstrated using this method.