Linear Propagation of Uncertainty in Probe Position Compensated Multiline-TRL

The quantification of uncertainty sources in on-waferS-parameters measurements is crucial to clarify the quality of the extracted models used in process design kits. In fact, a clear uncertainty budget expands our understanding of where first actions can be taken to improve such measurements. In this article, we propose a simplified approach to uncertainty quantification without the requirement of any waveguide or coaxial connection, e.g., without removing the probes. Then, we develop the uncertainty propagation algorithm applicable to these uncertainty sources.