We fabricated a piezoresistive microelectromechanical cantilever that contains an InAs∕Al0.5Ga0.5Sb quantum well and measured the piezoresistance as a function of perpendicular magnetic field at 2.0K. The magneto-piezoresistance shows the feature of Schvnikov–de Haas oscillation, indicating a strong quantum effect on the piezoresistance. At the magnetic field that gives the largest piezoresistance, displacement and force sensitivities of 10−11m∕Hz and 10−12N∕Hz, respectively, were obtained.
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Yamaguchi et al. (2005) studied this question.
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