Coating stress and spectral shift are affected by changing from ambient to vacuum environments. This change can affect optical systems that are aligned in air and used in a vacuum or in a dry environment. Spectral shifts up to 3% and reflected wave-front changes up to 0.35 waves peak to valley are reported for conventional electron-beam deposition and ion-assisted deposition. Alternatively, ion-beam sputtered coatings have virtually no changes between different pressure environments.
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Stolz et al. (1993) studied this question.
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