Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio

Universita¨t StuttgartInstitut fu¨r Technische OptikPfaffenwaldring 970569 Stuttgart, DeutschlandE-mail: tavrov@ito.uni-stuttgart.deAbstract. The signal-to-noise ratio required to obtain 10-nm accuracy inthe measurement of lateral position is studied with an interference mi-croscope. Evaluations are performed using the rigorous coupled-waveanalysis (RCWA) modal approach and Hopkins image formation theory.