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SUMMARY The ToF atom‐probe FIM is a microanalytical tool of ultimate sensitivity. Design and performance of the three presently operating instruments are described, including applications to metallurgical problems and contributions to basic effects in field ion microscopy. Up to four‐fold ionic charges of metals, field adsorption of noble gases, and the occurrence of metal‐helide ions have been surprising results. The mass resolution of present atom‐probes is marginal due to random ion energy deficits. A new energy deficit compensated atom‐probe offers a very satisfactory mass resolution of 1/1000.
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Erwin W. Müller (1974) studied this question.
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