In contrast to physical methods with large information depths, the results of quantitative XPS analysis are strongly influenced by oxide and/or contamination overlayers with a thickness of 1‐2 monolayers. A new method is introduced which allows the determination of a value d/(Λ ref cos ε)without the application of the variable take‐off angle technique. The significance of the results and their associated errors are discussed.
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Maria F. Ebel (1980) studied this question.