Electron collision cross sections of CHF3and electron transport in CHF3and CHF3–Ar mixtures

A set of electron collision cross sections for trifluoromethane (CHF3) is estimated by the electron swarm method. Electron transport coefficients in CHF3, such as the electron drift velocity, longitudinal diffusion coefficient, and effective ionisation coefficient, are calculated from the estimated cross section set by the Monte Carlo method, and the values are compared with the measured data. In the case of the transport coefficients, good agreement is obtained between the calculated and measured values in a wide range of reduced electric fields. Furthermore, the transport coefficients described above and the characteristic energy in CHF3–Ar mixtures are calculated, and the values are found to agree well with the measured data. This confirms the validity of the cross section set for CHF3 estimated here.