Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern

An atomic force microscope cantilever with PZT thin film with pyramidal stylus was used for actuation of feedback motion. The maximum stroke of the cantilever was more than 1 μm within a frequency range from direct current up to natural resonant frequency, e.g., 28.48 kHz. An image of a pit of a compact disk with a depth of 100 nm was successfully obtained using only cantilever actuation in a vertical direction.