Effect of nonthermal plasma reactor for CF/sub 4/ decomposition

In this paper, the CF/sub 4/ decomposition efficiency is investigated for three simulated plasma reactors: needle-plate reactor (NPR); metal-particle reactor (MPR); and dielectric-barrier reactor with hole (DBH). The CF/sub 4/ decomposition efficiency by DBH is much better than that by NPR or MPR. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the CF/sub 4/ decomposition efficiency is increased. The CF/sub 4/ decomposition efficiency in NPR and MPR is about 12% and 22%, respectively, at an applied voltage of 23 kV (consumption power: 110 W) and CF/sub 4/ concentration of 500 p/min, however, the CF/sub 4/ decomposition efficiency is higher than 95% in the case of DBH. The DBH should be much better than two reactors investigated for CF/sub 4/ decomposition.