A Carbon Arc Process for Treatment of CF4 Emissions

Light perfluorocarbons, such as carbon tetrafluoride, are produced or emitted from a variety of processes, including manufacture of aluminum and processing of semiconductor devices. At the same time, the long atmospheric lifetime and high global warming potential of such compounds makes them an environmental concern. A new process for the abatement of perfluorocarbon emissions using a carbon arc plasma was investigated. In particular, the conversion of CF 4 to C 2 F 4 and higher fluorinated species, including poly(tetrafluoroethylene) (PTFE) was demonstrated. General features of the reaction chemistry are discussed, including primary reactions to form radicals and ions and secondary reactions to form C 2 F 4 and higher compounds. The conversion efficiencies and products obtained in the reported experiments indicate potential applicability of the process for point source emission control of high global warming potential perfluorocarbons.