Molecular Lithography for Wafer-Scale Fabrication of Molecular Junctions

High-resolution patterning is critical for the development of functional devices and sensors with nanometer dimensions. To date, no patterning methodology exists with the capability to produce molecular-scale features reliably over an entire wafer. In this paper, a lithographic process is presented to fabricate pairs of electrodes reproducibly with nanometer-scale resolution quickly, efficiently, and economically. Additionally, this work demonstrates that molecules of interest can be added to, or removed from, patterned molecular junctions. This novel technology provides a relatively simple and economical means to produce devices capable of monitoring the addition of molecules to a structure.