A highly sensitive film bulk acoustic resonator (FBAR) mass sensor in liquid environments is described in this paper. A transmission line model is used to theoretically predict the dependence of the FBAR's resonant frequency on added mass. FBAR performance in a liquid environment is experimentally characterized for the first time and the effects of the liquid nature and conductivity on the FBAR series and parallel resonant frequencies are investigated. A TiO 2 -coated FBAR is developed for sensitive mass sensing of metal ions in a liquid environment.
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Zhang et al. (2005) studied this question.
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