Communication: There is much interest in the CVD of Pd films, which have a range of major applications. For Pd CVD, liquid precursors have many practical advantages and this paper reports the results of a systematic search for such precursors. Two have been found with the structure shown in the Figure, R1, R2, and R3 being either H or Me and R′ = tBu AND r″ = C3F7 in both cases. magnified image
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Zhang et al. (1997) studied this question.
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