An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide thin film electrode and an amorphous (Lipon) thin film electrolyte. The electrochemical behavior of the was characterized by a charge-discharge technique in the potential range of 0-2 V. The exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the at the first cycle is 38 mF/cm 2 μm.
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Lim et al. (2001) studied this question.
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