Phase error corrected 4-bit true time delay module using a cascaded 2 × 2 polymer waveguide switch array

A fully integrated 4-bit true time delay device using polymer optical switches and waveguide delay lines is demonstrated. The fabricated device, which contains five 2x2 thermo-optic switches, has a maximum power consumption of 143 mW and a switching time less than 3 ms. The rf phase error, which is affected by the optical switch cross talk, is also theoretically analyzed and proved to be negligible by experimental results.