Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO 2 thin film gas sensors

This is the authors' abstract. We don't add key points for this paper.

functionalisation was investigated. We identified an upper threshold for nanoparticle deposition time above which increased surface coverage did not result in further CO or VOC sensitivity enhancement. Most importantly, we demonstrate a method to adjust the selectivity between these target gases by simply adjusting the Pt nanoparticle deposition time. Using a simple computational model for nanocatalyst coverage resulting from random gas-phase deposition, we support our findings and discuss the effects of nanoparticle coalescence as well as inter-particle distances on sensor functionalisation.