Atomic-scale structural changes with composition in sputtered amorphous a-Si 1-y Ni y :H alloys with y varying from 0 to 1 have been studied by the X-ray absorption fine structure (EXAFS) technique. Complementary structural information from infrared (IR) spectroscopy has also been obtained. The EXAFS results indicate that there is a significant change in the local environment of the Ni atoms as their concentration is changed and the system appears to be chemically ordered; in the sense that the number of Ni-Ni bonds is minimized. The Si-Ni distance shows no significant variation with concentration and is the same as that found in crystalline nickel silicide. The Si-Ni Debye-Waller factors are also almost independent of composition. A correlation between these results and the infrared spectra is established.
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Asal et al. (1992) studied this question.
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