Bi-layer Al2O3/ZnO atomic layer deposition for controllable conductive coatings on polypropylene nonwoven fiber mats

Electrically conductive zinc oxide coatings are applied to polypropylene nonwoven fiber mats by atomic layer deposition (ALD) at 50–155 °C. A low temperature (50 °C) aluminum oxide ALD base layer on the polypropylene limits diffusion of diethyl zinc into the polypropylene, resulting in ZnO layers with properties similar to those on planar silicon. Effective conductivity of 63 S/cm is achieved for ZnO on Al2O3 coated polypropylene fibers, and the fibers remain conductive for months after coating. Without the Al2O3 precoating, the effective conductivity was much smaller, consistent with precursor diffusion into the polymer and sub-surface ZnO nucleation. Mechanical robustness tests showed that conductive samples bent around a 6 mm radius maintained up to 40% of the pre-bending conductivity. Linkages between electrical conductivity and mechanical performance will help inform materials choice for flexible and porous electronics including textile-based sensors and antennas.