Compact Modeling of a Flash Memory Cell Including Substrate-Bias-Dependent Hot-Electron Gate Current

We propose a compact model for a Flash memory cell that is suitable for circuit simulation. The model includes a hot-electron gate current model that considers not only channel hot electron injection but also channel initiated secondary electron injection to express properly substrate bias dependence of gate current. Tunneling gate current for erasing is expressed by the BSIM4 tunneling gate current model. Good agreement between measured and simulated results of both programming and erasing characteristics for 130-nm technology Flash memory cells indicates that our model is useful in designing and optimizing circuit for Flash memories.