Hollow optical fibers composed of glass capillary tubing with an inner coating of aluminum thin film are fabricated for delivery of ultraviolet and vacuum ultraviolet light. The aluminum film is formed by a chemical vapor deposition method employing a metalorganic aluminum as a precursor. Transmission properties of the aluminum-coated hollow fibers are evaluated with ArF- and F/sub 2/-excimer lasers. Spectroscopy measurement in the vacuum ultraviolet region is also performed.
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Matsuura et al. (2004) studied this question.
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