Characterization of a fabrication process for the integration of superconducting qubits and rapid-single-flux-quantum circuits, Castellano, Maria Gabriella, Grönberg, Leif, Carelli, Pasquale, Chiarello, Fabio, Cosmelli, Carlo, Leoni, Roberto, Poletto, Stefano, Torrioli, Guido, Hassel, Juha, Helistö, Panu
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Castellano et al. (2006) studied this question.
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