A sensitive computational method allowed the determination of 0.7 kcal/mol based on various previously reported experimental investigations. For the first time the gaseous compounds and were included in a thermodynamic evaluation of the Si‐H‐Cl system. Diagrams relating over the temperature range of 400°–1700°K indicate the equilibrium state of the system with respect to the corresponding increase or decrease of silicon in the gaseous phase.
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Hunt et al. (1972) studied this question.