Precise setting of micro-cavity resonance wavelength by dry etching

With an intracavity phase tuning technique, the authors demonstrate <2 nm precision in wavelength setting of vertical-cavity surface-emitting laser (VCSEL) microresonators in the wavelength range 1040–1070 nm using an Ar ion-beam etching process with subnanometer precision in etch depth. This postgrowth fabrication technique for controlling the wavelength of individual VCSELs is promising for the development of monolithic multiwavelength VCSEL arrays with precisely defined wavelengths for wavelength division multiplexed (WDM) optical interconnects and the assembly of compact and high-capacity WDM transmitters.