A driving scheme using a pair of differential voltages ( V x , V y ) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V.
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Tsai et al. (2007) studied this question.
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