The defect properties of p‐type CuInSe2single crystals hydrogenated by diffusion from a plasma source are investigated using the Rutherford backscattering/channeling technique and photoacoustic spectroscopy. Plasma hydrogenation is found to produce severe lattice damage, to affect the intrinsic defect equilibrium in the near surface region of the crystals and to create an additional donor. A defect formation model including both defect passivation by hydrogen and damage induced defect creation is proposed to explain the experimental data. The thermal stability of the property modifications is limited to temperatures below about 100 °C.
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Yakushev et al. (1994) studied this question.
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