Theoretical values of the inelastic mean free path (IMFP) and their electron-energy dependence are available in the literature from predictive formulae for various categories of materials, such as elemental solids, inorganic and organic compounds. in contrast, the experimental IMFP values were determined for a more limited number of materials. This refers especially to multicomponent solids. We have measured the IMFP dependence on energy for Cu and two copper oxides, CuO and Cu2O, using elastic peak electron spectroscopy. The experiment consisted of measuring the backscattering probabilities for the investigated materials and an Ni standard in the energy range 400–1600 eV. The IMFP values were determined using a theoretical model describing the phenomenon of elastic backscattering. The IMFP values determined in this work are in reasonable agreement with experimental and theoretical values published in the literature.
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Lesiak et al. (1998) studied this question.