ZrO 2 Nanopowders Prepared by Low‐Temperature Vapor‐Phase Hydrolysis

ZrO 2 powder is prepared by low‐temperature vapor‐phase hydrolysis of ZrCl 4 . TG‐DTA, XRD, Raman, BET, and TEM methods are used to investigate the particle size, phase composition, and agglomeration before and after heat treatment. The results show that the as‐prepared ZrO 2 powder is characterized by large surface area (150 m 2 /g), fine grain size (5.8 nm), and weak agglomeration. Additionally, the as‐prepared ZrO 2 powder shows predominantly tetragonal phase attributed to a grain size effect. This route is free of powder drying and calcination processes that are essential for wet chemical preparation, contributing to less agglomeration.