In this work, we report on superconductivity (SC) found in thin B-doped nanocrystalline diamond films, prepared by the PE-CVD technique. The thickness of the films varies from about 100 to 400 nm, the films are grown on low-alkaline glass at substrate temperatures of about 500–700 °C. The SIMS measurements show that films can be heavily doped with boron in concentrations in the range of 3 × 1021 cm−3. The Raman spectra show Fano resonances, confirming the substitutional B-incorporation. The low temperature magnetotransport measurements reveal apositive magnetoresistance. The SC transition is observed at about Tc = 1.66 K. A simple theory exploiting the concept of weak localization accounting for this transition is proposed.
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