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The soluble part of glow discharge polysilazane prepared from hexamethylcyclotrisilazane was studied. The composition of the soluble fraction was examined by gas chromatography and mass spectrometry. It was found that the fraction contained five main components, and two of them, identified by mass spectrometry, were octamethylcyclotetrasilazane and bicyclic silazane dimer. A reaction mechanism leading to dimer formation from hexamethylcyclotrisilazane in glow discharge was proposed.
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Gazicki‐Lipman et al. (1977) studied this question.
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