Tip–sample capacitance in capacitance microscopy of dielectric films

The tip–sample capacitance in the scanning capacitance microscopy (SCM) of dielectric films is described through theoretical calculations based on the method of images. The results are explained with the charge density distribution in the tip–sample system. Furthermore, capacitance signals in the tapping mode SCM of dielectric films are experimentally investigated and found to be in good agreement with the simulation results.