In this study, we used pulsed laser deposition to successfully grow epitaxial Hf 0.5 Zr 0.5 O 2 (HZO) films on (001)-, (011)- and (111)-oriented yttria-stabilized zirconia (YSZ) substrates using TiN as the bottom electrode.
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Li et al. (2018) studied this question.
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