Dense and thin film electrodes were prepared on yttria‐stabilized zirconia (YSZ) electrolyte by vapor‐phase processes. In order to construct the electrochemical system, the YSZ film was first deposited by a chemical vapor deposition‐electrochemical vapor deposition method on porous substrate. Then the film was deposited on the YSZ film by using a vapor mixture of , and as metal sources and humidified oxygen gas as an oxygen source. The as‐prepared thin films were uniform and pinhole‐free, and adhered strongly to the YSZ film. The electrochemical conductivity of the thin film was comparable to that of sintered . The electrode interface resistance of the deposited film, which was determined by ac impedance measurements, was proportional to the film thickness, and the inverse of the electrode interface resistance was proportional to the electrode surface area of the thin film. In the thin‐film electrode, it was concluded that oxygen is reduced to oxide ions at the electrode surface and they are transported through the electrode thin film to the electrolyte.
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Ioroi et al. (1997) studied this question.