The deposition rate of polymer from plasma of an organic compound is influenced by the fluid mechanical aspect of plasma. Using cylindrical reactors which have constriction of various size, and utilizing the tail-flame portion of inductively coupled r.f. (13.5 MHz) glow discharge, it is demonstrated that the polymer deposition rate is proportional to the ratio of surface area/volume of the reactor tube, which has been often neglected in studies of polymer deposition rate.
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Yasuda et al. (1976) studied this question.
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