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October 17, 2003Journal of Micromechanics and MicroengineeringOpen Access

Development and accuracy assessment of simplified electromechanical coupling solvers for MEMS applications

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KOK-S OuLLL-M Li

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Ou et al. (2003) studied this question.

synapsesocial.com/papers/6aa144a64a69955868ac7a31https://doi.org/10.1088/0960-1317/14/2/001
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