Preparation of spinel ferrite thin films by plasma assisted MO-CVD.

Thin films of spine1 ferrite CoxFe3-xO4 (0≤x≤1.0) were prepared by plasma assisted MO-CVD from mixed vapor containing Fe(C5H7O2)3, Co(C5H7O2)3 and O2. X-Ray diffraction patterns and SEM images of the films showed that the films had columnar structure with <100> preferred orientation irrespective of Co content x, and the diameter of the column changed from 1500Å to 400Å with an increase in Co content x from 0 to 1.00. CEMS spectra and B-H loops of the films indicated that direction of the magnetic spin in the film without Co was random, but with increasing Co content it tended to become perpendicular to the film surface.