TEA CO2 laser irradiation of gaseous mixtures of silacyclopent-3-ene, Fe(CO)5, SF6 and Ar initiates decomposition of Fe(CO)5 along with dehydrogenation/polymerization of silacyclopent-3-ene and affords chemical vapour deposition of thin layers of Fe-containing unsaturated organosilicon polymer. It is inferred that the gas-phase dehydrogenation/polymerization of silacyclopent-3-ene is assisted by an in situ generated Fe(CO)x species and taking place via ring cleavage of cyclic silylene. The reported process is the first example of laser-induced gas-phase polymerization assisted by in-situ generated species.
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Fajgаr et al. (2003) studied this question.