etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples M A Gosálvez, Prem Pal, N Ferrando et al. - Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations N Ferrando, M A Gosálvez, J Cerdá et al.
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Montoliu et al. (2013) studied this question.
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