Logical Behavior in Memory Devices of Coupled Nonlinear MEMS Resonators

This paper focuses on a logical behav- ior of coupled memory devices consisting of nonlinear micro-electro-mechanical systems (MEMS) resonators. A nonlinear MEMS resonator substantially exhibits two coexisting stable states, hysteretic characteristics, and so on. Previous studies showed that a nonlinear MEMS resonator can be applied as a mechanical 1-bit memory device and can be used as AND and OR logic gates. From the standpoint of application of logic sys- tem by using the coupled nonlinear MEMS resonators, we address the controlling nonlinear behavior by nu- merical simulations.