Scalable Microwave Plasma Sources From Low to Atmospheric Pressure

There are very specific demands on the plasma processes used in various plasma technological applications. Microwave plasmas offer a wide range of applications for different pressures ranging from very low pressure (<0.1 Pa) over low pressure (0.1‐100 Pa) and medium pressure (103‐104 Pa) up to atmospheric pressure (105 Pa). This contribution is a short review on some microwave based plasma sources at different pressure ranges and a brief introduction into the plasma physics behind them (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)