The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p 5 ) is discussed as functions of gas flow, gas pressure and power dissipation.
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Nakano et al. (1996) studied this question.