Versatile Silicon Nitride and Alumina Integrated Photonic Platforms for the Ultraviolet to Short-Wave Infrared

We demonstrate scalable and intercompatible multilayer photonic platforms that operate over a multioctave wavelength range from the near-ultraviolet (NUV) into the short-wave infrared (SWIR). We demonstrate low-loss waveguides (≤3 dB/cm above 370 nm and2O3) optical waveguides cladd with silicon dioxide (SiO2). They can be combined in multilayer stacks to enable complex routing of multiple wavelengths, making them useful for applications ranging from atomic-molecular-optical applications to biophotonics to integrated microwave photonics.