Unusual effects are seen when heavily p‐doped polycrystalline Si is deposited via the system. For example, material resistivity does not diminish monotonically as abundance is increased; also, resistivity variation due to subsequent layer oxidation is not monotonic. Manipulation of these and associated effects, such as variation in the volumetric conversion ratio to the oxide, can result in product improvements.
No takes yet. Share an insight, caveat, or question.
Chappelow et al. (1976) studied this question.