We report on the characterization of a hybrid laser scanning system using acousto-optical deflectors in combination with galvanometer scanners for ultra-short pulse laser material processing. The hybrid scanning system is characterized by the roundness of static pulsed ablations of metal thin film on a transparent substrate within the acousto-optical scanning field at different galvanometer scanner deflection angles and laser focal positions. An ablation roundness of more than 90% is reached in a defocusing range of 200 m μ m within a galvanometer scanfield of 900 mm² mm 2 , corresponding to approximately 74% of the usable scan area of the f-theta lens. A high maximum positioning speed of 843 m/s is pointed out within an acousto-optical scanfield of 0.4 mm² mm 2 by applying positioning frequencies of up to 1 MHz across a distance of 843 m μ m . Consequently, the hybrid scanning system combines the advantages of optical and mirror-based scanners, enabling a highly dynamic and extremely precise laser beam positioning in a large processing area.
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Franz et al. (2022) studied this question.
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