A manganese oxide (MnO x ) diffusion barrier layer was formed by chemical vapor deposition (CVD) on SiO2 substrates with or without preannealing. The thickness dependence of the MnO x layer was investigated in relation to the desorption behavior of water vapor from the substrates. A good correlation was found between MnO x thickness and the amount of desorbed water vapor. It is necessary to control the amount of absorbed water in the substrate to form a thin MnO x barrier layer with good thickness reproducibility.
No takes yet. Share an insight, caveat, or question.
Matsumoto et al. (2010) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: