We have developed superconducting, single-photon imaging X-ray detectors with an energy resolution of 26 eV FWHM at 6 keV and a spatial resolution of 0.5 /spl mu/m over an effective area of 18 /spl mu/m/spl times/100 /spl mu/m. The energy resolution is among the best reported for this kind of detector and is within a factor of /spl ap/4 of its theoretical limit. The calculated absorption efficiency of the detector is 28%. Scaling to larger areas and higher quantum efficiency appear possible. We discuss the device design and readout along with possible sources of resolution broadening.
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Segall et al. (1999) studied this question.
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