Radially polarized illumination produces, in combination with annular pupil filtering, the sharpest focal spot. However, the enhanced sidelobes produce an effective deterioration of spatial resolution. This study shows that if one substitutes the annular filter by one, adequately designed, shaded-mask filter, the sidelobes' strength is strongly reduced, and an important, effective improvement of resolution is achieved.
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Cristina Ibáñez‐López (2006) studied this question.
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