Structural properties of heteroepitaxial systems using hybrid multiple diffraction in Renninger scans

A method of characterizing heteroepitaxial structures using hybrid multiple diffractions (hybrid MD) which appear in the layer Renninger scans (RS) together with the normal MD features, is reported. The three beam surface MD cases are used to provide high intensity and structural sensitivity. The RS peak measurements around the symmetry mirrors allow for the layer parallel lattice parameter determination. A simulation program was developed in order to account for the influence of the wavelength, incident beam divergence, sample mosaic spread, and substrate/layer lattice misorientation in the correct position and profile of the RS peaks. GaAs/Si samples with different layer thicknesses have been analyzed as an application of the method.